High-voltage energy dispersive x-ray spectrometry using a low-energy primary beam

Publications

Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Oct 2014 | 32 (6), 06FC05

DOI: 10.1116/1.4901883

High-voltage energy dispersive x-ray spectrometry using a low-energy primary beam

Wu, Ying ; Klyachko, Dimitri ; Davilla, Scott ; Spallas, James ; Indermuehle, Scott ; Muray, Lawrence P.

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High-voltage energy dispersive x-ray spectrometry using a low-energy primary beam

PRODUCTS USED

ABSTRACT

PRODUCTS USED

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